Diamond lift off
WebSep 1, 2005 · Ion-Beam-Assisted Lift-Off Technique for Three-Dimensional Micromachining of Freestanding Single-Crystal Diamond † P. Olivero, S. Rubanov, P. Reichart, B. C. … WebMay 1, 2024 · We designed and made 15 μm large area vertical Schottky barrier diamond diodes with resulting substrate thickness of about 1 μm.The ion-beam assisted lift-off technique was successfully used to separate 5 × 5 mm 2 active two-layered structure from ballast HPHT diamond substrate. The fabricated diodes had < 6 mΩ ∗ cm 2 (0.03 Ω) on …
Diamond lift off
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WebOct 1, 2009 · The Substrate used was a 9x9 mm 2 single-crystal HPHT Ib (Sumitomo Electric Hardmetal) or a laboratory grown CVD diamond. Freestanding single-crystal diamond plates were produced by the lift-off process using ion implantation [12].Prior to growth, the substrate was implanted with 3 MeV of carbon ions at a dose of 2 × 10 16 … WebJun 6, 2011 · @article{osti_21518471, title = {Surface damage on diamond membranes fabricated by ion implantation and lift-off}, author = {Drumm, V S and Alves, A D. C. and Fairchild, B A and Ganesan, K and McCallum, J C and Jamieson, D N and Prawer, S and Rubanov, S and Kalish, R and Feldman, L C and Institute of Advanced Materials, …
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